On this paper, The brand new lapping slurry and sharpening slurry are introduced. As well as the deliquescence diploma of CLBO is fallen to least expensive. A different Performing technology is additionally adopted. Just after tough sprucing, the concentration of extremely-precision sprucing slurry is enhanced effectively. So does the ultra-precision sprucing pace, as well as the wiping velocity is quicker when compared to the deliquescence velocity. The CLBO crystal surface area roughness can reach 1nm and keep the surface area high-quality perfectly. Accessibility by means of your institution
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We summarized the current development position on the higher-electric power DUV laser the two at the wavelength of FHG with the 1-μm laser and at 193 nm. The the latest advancement of your reliable-condition/fiber laser, in addition to the nonlinear optical crystals, prompts not only the common energy and also the beam quality (coherence) in the DUV lasers to an unparalleled amount.
For illustration, The present concave OC could get replaced by a plane mirror which could mitigate the ability density over the floor of M1 along with the diamond. Moreover, employing superior injury threshold coatings for M1 and diamond would also improve the output electricity with none damages. Then, the NIR laser in the 2nd Stokes wavelength could possibly be significant sufficient, and also its superior beam high quality, to produce the final DUV laser at 193 nm having a large common energy.
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Mainly because of the thermal lens result during the reliable-state lasers, if the heating management is inadequate, It's not uncomplicated to obtain the sound-condition laser which has a higher electricity plus a significant beam quality simultaneously. A short while ago, with the development of the thin disk laser and single-crystal fiber (SCF) laser, a higher-electricity laser at the basic wavelength (1 μm) had been realized with a great beam high quality even with a TEM00 manner beam [4,24], which would be great candidates for the basic from the DUV laser generation. A further applicant for the elemental is the high-electricity fiber laser which may be realized by coherent beam mixture with M2 price fewer than one.
On the other aspect, the ability scaling of the NIR laser is another component to improve the typical ability of your 193-nm DUV laser. As a result of insufficient the substantial-power amplification solution of your NIR laser (by way of example at 1553 nm), nonlinear frequency procedures such as optical parameter oscillation (OPO) can be placed on establish a wavelength converter by shifting the wavelength from one μm to the desired wavelength along with acquiring relative increased electric power [21]. Lately, a diamond Raman laser showed its capacity in obtaining a significant electric power and also a significant conversion effectiveness on the 1st Stokes in the 1-μm laser [22,23], which means the likelihood to get applied in the 193-nm DUV laser technology thanks to its superior Raman achieve and large frequency change.
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The heartbeat duration of the 2nd Stokes mild was shortened to five ns as shown in Figure 7a, one-shot picture within the oscilloscope, that's a common phenomenon in Raman laser [44] though the pulse length of the pump CLBO Crystal laser was 10 ns.
Also, combining the strong-point out laser with other nonlinear procedure which include stimulated Raman scattering, NIR lasers may be achieved at new wavelengths with substantial power and superior beam top quality, which was examined via the proof-of-principle experiment. This Raman laser scheme gives a different route to the significant-ability DUV laser, especially at the wavelength of 193 nm.
Tunable ultraviolet laser supply depending on stable-condition dye laser know-how and CsLiB6O10 harmonic era
Its UV absorption edge reaches 180 nm. The successful nonlinear optical coefficient of CLBO for frequency doubling at 1064nm is about 2 times as significant as that of KDP. CLBO crystals is usually grown within the stoichiometric melt with reduced viscosity.
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